ILC3 and ILC4

ILC Motorized Lens Changer

Automated accurate lens positioning

​Elevate your inspection workflow with ILC, where performance and affordability come together. ILC is designed for high-demand optical inspection and FPD/semiconductor fab systems. It allows efficient imaging by quick, stable, and reliable lens switching by utilizing proven-reliable stepper-ball screw-encoder motion system.

Compare to any lens switch solution in the market, it is lighter and adds minimum distance to the optical path, which allows maximum field of view. Compare to the shaft servo motor system, it is much less sensitive to the external vibration and force, so it is quicker to settle and reliable in variety of conditions. Compare to rotary turret, it is lighter and quicker, and retains higher repeatability over longer life.

Request an offer
With IZS Z-stage, the optical path is extended by only 5.5mm minimizing effect on FOV
Switch the lens in 0.66s with repeatability below 0.8um
ILC3 integrated with IZS

Summary:

  • Adds only 5.5 mm to the optical path (when integrated with IZS)
  • Light weight: ILC3 – 1.5kg, ILC4 – 1.8kg
  • Repeatability: < 0.8µm
  • Lens switch time (@ 1 G external force):

         – nearest: 0.66 sec
         – 2 lens distance: 1.2 sec
         – 3 lens distance: 1.8 sec

ILC3 and ILC4 (3 and 4 objective lens versions) are readily available. Other versions (ILC2 & ILC5, and for HR & macro lenses) can be configured.

ILC3 integrated with IZS on MGS microscope
ILC3 integrated with IZS on MGS microscope
ILC3 integrated with MOC and AF system

ILC3 and ILC4 details:

The ILC devices boasts several important features that enhance their performance in automated optical inspection. Key features include:
 
  • Motion system: high-precision ball screw, non-contact encoder (no detent), ball bearing LM guide
  • Motion parameter (typical): 65 mm/s maximum speed @ 650 mm/s/s acceleration (@ 1 G external force)
  • Encoder Resolution: 0.49 µm
  • Motor: 2-phase step motor with 0.315 µm resolution
  • Limit sensor: Hall effect (non-contact)
  • Distance between Lenses: Standard distance of 36 mm (custom distance for larger lenses available upon request)
  • Lens mount: Mitutoyo M26-0.706 (other thread available upon request)
  • Optical Performance: Adds only 5.5 mm of distance compared to the IZS alone optimizing FOV.
  • Communication: simple and robust protocol over RS232 or RS422
  • Integrated Controller: No extra control box to mount
  • Power: 0.3A @ 24V
  • Firmware / user software (provided):
          – adjustable motion parameters (settling optimization)
          – soft deceleration option
          – adjustable position offset for each OL
✕

Request a quote